Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope
- Resource Type
- Conference
- Authors
- Forke, Roman; Shaporin, Alexey; Weidlich, Sebastian; Bulz, Daniel; Hiller, Karla; Kuhn, Harald
- Source
- 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2023 IEEE International Symposium on. :1-4 Mar, 2023
- Subject
- General Topics for Engineers
Micromechanical devices
Vibrations
Electrodes
Vibrometers
Shape
Inertial sensors
Gyroscopes
MEMS
gyroscope
angular rate
sensor
quadrature suppression
compensation
BDRIE
cavity-SOI
HAR
- Language
- ISSN
- 2377-3480
Within this paper we report on a new efficient shape of comb electrodes for the use in DC quadrature compensation. With the help of finite element (FE) simulations, we support the thesis about one very important technological reason of the quadrature error in MEMS gyroscopes. Vibrometer measurements with the Polytec MSA-100-3D at working MEMS gyroscopes with and without quadrature compensation help to understand the mechanism. With the quadrature suppression, we see a large improvement of the noise performance of the MEMS vibratory gyroscope sensor reaching a bias instability below $\boldsymbol{0.04^{\circ}/\mathrm{h}}$ and an angle random walk down to $0.01^{\circ}/\surd\mathrm{h}$.