The study of PZT ferroelectric thin film and composite with amorphous silicon
- Resource Type
- Conference
- Authors
- Ling, W.Y.; Huai, W.D.; Ting, C.H.; Wei, Y.D.
- Source
- ISAF '92: Proceedings of the Eighth IEEE International Symposium on Applications of Ferroelectrics Applications of Ferroelectrics, 1992. ISAF '92., Proceedings of the Eighth IEEE International Symposium on. :353-355 1992
- Subject
- Engineered Materials, Dielectrics and Plasmas
Components, Circuits, Devices and Systems
Ferroelectric materials
Transistors
Sputtering
Ceramics
Optical polarization
Titanium compounds
Radio frequency
Optical devices
Amorphous silicon
Optical design
- Language
The remanant polarization and coercive field of PZT (lead zirconate titanate) ceramics have been investigated as a function of specimen thickness. The properties of PZT thin film prepared by RF sputtering were also studied. In addition, novel optical devices with composite amorphous silicon and PZT ceramics were designed.ETX