Development of backing piezoelectric micromachined ultrasonic transducer (B-PMUT) 2D array
- Resource Type
- Conference
- Authors
- Wang, Xu-Bo; Ma, You-Cao; He, Le-Ming; Wang, Yan; Xu, Wei-Jiang; Riaud, Antoine; Ren, Jun-Yan; Zhou, Jia
- Source
- 2021 IEEE International Ultrasonics Symposium (IUS) Ultrasonics Symposium (IUS), 2021 IEEE International. :1-4 Sep, 2021
- Subject
- Bioengineering
Fields, Waves and Electromagnetics
Signal Processing and Analysis
Ultrasonic transducers
Damping
Loading
Crosstalk
Ultrasonic transducer arrays
Bandwidth
Acoustics
pMUTs
2D array
PDMS
Backing
- Language
- ISSN
- 1948-5727
To improve the problem of narrow bandwidth and large crosstalk in high-frequency PMUT array, a PMUT device with a damping backing structure (B-PMUT) is proposed and realized. The device is a two-dimensional array of 8×16 elements with an element pitch of 75 µm. The results show that the bandwidth of the device with backing is more than doubled (63%) to that of without backing. The crosstalk level between two neighboring elements decreased from −13.4 dB to −17 dB.