Germanium on Silicon Photodiodes for Back-End-Of-Line Photonic Integration
- Resource Type
- Conference
- Source
- 2023 IEEE Silicon Photonics Conference (SiPhotonics) Silicon Photonics Conference (SiPhotonics), 2023 IEEE. :1-2 Apr, 2023
- Subject
Photonics and Electrooptics Performance evaluation Annealing Temperature PIN photodiodes Doping Dark current Germanium germanium photodiodes silicon photonics - Language
- ISSN
- 1949-209X