Electrically Tunable Bulk Acoustic Filters with Induced Piezoelectric Effect in BSTO Film
- Resource Type
- Conference
- Authors
- Turalchuk, Pavel; Vendik, Irina; Vendik, Orest; Berge, John
- Source
- 2008 38th European Microwave Conference Microwave Conference, 2008. EuMC 2008. 38th European. :1695-1698 Oct, 2008
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Aerospace
Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Piezoelectric effect
Piezoelectric films
Film bulk acoustic resonators
Resonator filters
Microwave filters
Band pass filters
Acoustic applications
Ferroelectric materials
Electrodes
Mirrors
- Language
In this paper we discuss a potential realizability of a tunable bulk acoustic filter based on BSTO film for microwave applications. The estimation of characteristics of the tunable TFBAR was done by processing the experimental data obtained for the BSTO resonator using the model of the induced piezoelectric effect. The third-order tunable TFBAR filter was designed. The necessary set of the acoustic and electric parameters of the tunable ferroelectric based TFBAR was proclaimed. The 10% tunability of the TFBAR filter pass band was estimated by a simulation. The simulated characteristics were obtained taking into consideration a real structure of the BSTO based resonators (electrodes and acoustic mirror).