Modelling of tuneable acoustic resonators based on BSTO films with induced piezoelectric effect
- Resource Type
- Conference
- Authors
- Turalchuk, Pavel; Vendik, Irina; Vendik, Orest; Berge, John
- Source
- 2007 European Microwave Conference Microwave Conference, 2007. European. :282-285 Oct, 2007
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Aerospace
Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Piezoelectric films
Piezoelectric effect
Film bulk acoustic resonators
Electrostriction
Tensile stress
Ferroelectric materials
Impedance
Piezoelectric materials
Nonlinear equations
Microwave devices
- Language
A reliable model of a tuneable bulk acoustic resonator based on BSTO film with induced piezoelectric effect is proposed. The estimation of resonance and antiresonance frequency shift of bulk acoustic resonator as a function of the applied voltage has been carried out. The results of the input impedance modelling of the BSTO bulk acoustic resonator are in agreement with the experimental data.