Decreasing the Actuation Voltage in Electrowetting on Dielectric With Thin and Micro-Structured Dielectric
- Resource Type
- Conference
- Authors
- Turk, Semih; Verheyen, Erik; Viga, Reinhard; Allani, Sonja; Jupe, Andreas; Vogt, Holger
- Source
- 2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) Ph.D. Research in Microelectronics and Electronics (PRIME), 2018 14th Conference on. :205-208 Jul, 2018
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
General Topics for Engineers
Power, Energy and Industry Applications
Signal Processing and Analysis
- Language
This work presents the analysis of the minimum actuation voltage $V_{\min}$ for droplet actuation with electrowetting on dielectric (EWOD). First, the fundamentals of electrowetting are described. In the second chapter, the impact on the actuation voltage in EWOD is shown by a dielectric deposited with atomic layer deposition (ALD) and micro-structured surface. In the last part, results of a simulation with COMSOL MultiphysicsOR are presented to verify the hypothesis and a short discussion about the results is given.