Highly effective and versatile test structure for evaluating dielectric properties using flexible pulse generator on chip
- Resource Type
- Conference
- Source
- 2016 International Conference on Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2016 International Conference on. :106-109 Mar, 2016
- Subject
Components, Circuits, Devices and Systems Logic gates Pulse generation Pulse measurements Dielectrics Frequency measurement Charge pumps Semiconductor device measurement charge-based capacitance measurement charge-pumping current tunable ring oscillator start-stop pulse controller gate oxide dielectric properties interface trap density - Language
- ISSN
- 1071-9032
2158-1029