The dynamic response analysis of a pyroelectric thin-film infrared sensor with thermal isolation improvement structure
- Resource Type
- Periodical
- Authors
- Jyh-Jier Ho; Fang, Y.K.; Lee, W.J.; Chen, F.Y.; Hsieh, W.T.; Ting, S.F.; Ju, M.S.; Huang, S.B.; Kun-Hsien Wu; Chen, C.Y.
- Source
- IEEE Transactions on Electron Devices IEEE Trans. Electron Devices Electron Devices, IEEE Transactions on. 46(12):2289-2294 Dec, 1999
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Lead materials/devices
- Language
- ISSN
- 0018-9383
1557-9646
Both theoretical and experimental studies of the substrate effect on the thermal behavior of a PbTiO/sub 3/ infrared (IR) sensor have been reported. With active cantilever dimensions of 200/spl times/100/spl times/5 /spl mu/m/sup 3/ formed by etching processes, the pyroelectric micro-electro-mechanical system (pyro/MEMS) structure exhibits a much superior performance to that of a traditional IR-sensing bulk structure under the 800-/spl mu/W incident optical light with wavelength of 970 nm. Two-order improvement in current responsivity is obtained for the pyro/MEMS structure. This shows the substrate effect on the performance of a pyro/MEMS IR sensor is very significant. A simple model has also been proposed to illustrate the substrate effect more comprehensively.