Development of radio-opaque silicon micro needles for medical diagnostics
- Resource Type
- Conference
- Authors
- Lim, R.; Nandar, S.; Chandrappan, J.; Tang, S.Q.; Vaidyanathan, K.; Nagarajan, R.
- Source
- 2010 12th Electronics Packaging Technology Conference Electronics Packaging Technology Conference (EPTC), 2010 12th. :84-88 Dec, 2010
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Needles
Silicon
Cavity resonators
Barium
X-ray imaging
Resists
- Language
In this paper, a method of fabricating radio opaque silicon micro needles for tissue labeling applications is reported. Cylindrical shaped micro needles ranging from 7 × 7 to 11 × 11 arrays with a pitch varying from 60 µm to 100µm are fabricated in silicon using a three step mask process. A backside cavity is generated under DRIE for filling the radiopaque material. Barium sulphate is filled in and a biocompatible sealing is provided to hold the radiopaque material inside. The fabricated needles provide a better contrast enhancement under x-ray imaging.