Reducing the optical loss of polysilicon waveguide in bulk CMOS by waveguide geometry engineering
- Resource Type
- Conference
- Authors
- Song, Zhan-Wen; Tang, Cheng-Tse; Lee, San-Liang; Hung, Yung-Jr
- Source
- 2020 Opto-Electronics and Communications Conference (OECC) Opto-Electronics and Communications Conference (OECC), 2020. :1-3 Oct, 2020
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Signal Processing and Analysis
Optical waveguides
Optical losses
Optical polarization
Optical scattering
Optical variables control
Optical refraction
Strips
polysilicon
bulk CMOS
subwavelength grating waveguide
- Language
- ISSN
- 2166-8892
Based on the zero-process-change methodology, we successfully reduce the propagation loss of polysilicon waveguide from 112 dB/cm to only 38 dB/cm by applying subwavelength grating waveguide (SWG) design. Low propagation loss in SWG waveguide is attributed to a significantly reduced optical overlap factor of 0.09 to bulk polysilicon. This achievement can not be made by solely shrinking the waveguide dimension, thus validates a promising design path towards practical photonic-electronic applications in bulk CMOS.