A CMOS MEMS Pressure Sensor for Blood Pulse and Pressure Measurement Applications
- Resource Type
- Conference
- Authors
- Shih, Horng-Yuan; Hsin, Chin-Te; Yang, Cheng-Wei; Chen, Hsin-Liang; Kuo, Jhe-Yuan
- Source
- 2021 International Symposium on Intelligent Signal Processing and Communication Systems (ISPACS) Intelligent Signal Processing and Communication Systems (ISPACS),2021 International Symposium on. :1-2 Nov, 2021
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Signal Processing and Analysis
Micromechanical devices
Pressure sensors
Sensitivity
Communication systems
Signal processing
Gain measurement
Pressure measurement
CMOS MEMS
pressure sensor
blood pulse
- Language
A CMOS MEMS pressure sensor for blood pulse and pressure measurement applications is proposed. A capacitive MEMS sensor implemented in UMC 0.18 μm CMOS MEMS process is adopted to sense blood pulses and pressure. A readout circuit is designed and integrated with the MEMS sensor. The capacitive MEMS sensor has a sensitivity of 6.53 fF/kPa with a sensing range of 4-40 kPa (30-300 mmHg). The overall system has a measured conversion gain of 4.72 mV/kPa. The power dissipation of the whole circuit is only 6.46 μW.