Bandgap-tunable III‐V‐OI Photonics Platform with Quantum Well Intermixing for Versatile Active-passive Integration of Chip-scale Photonic Integrated Circuits
- Resource Type
- Conference
- Authors
- Sekine, N.; Toprasertpong, K.; Takagi, S.; Takenaka, M.
- Source
- 2021 Symposium on VLSI Circuits VLSI Circuits, 2021 Symposium on. :1-2 Jun, 2021
- Subject
- Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Power, Energy and Industry Applications
Signal Processing and Analysis
Photonic band gap
Phase modulation
Optical switches
Optical device fabrication
Photonic integrated circuits
Optical imaging
Optical modulation
- Language
- ISSN
- 2158-5636
We investigated monolithic active-passive integration on III-V-OI photonics platform using quantum well intermixing for photonic integrated circuits. We developed the void-free wafer bonding technique and established large bandgap modulation through quantum well intermixing using low-energy hot P 2 + molecular ion implantation. We monolithically integrated passive waveguides, waveguide PDs, electro-absorption (EA) modulators, optical switches with carrier-injection optical phase shifters on III-V-OI operating at 1.55 μm wavelength.