Demonstration of a Non-Volatile Antiferroelectric Pyroelectric Switch
- Resource Type
- Conference
- Authors
- Lomenzo, Patrick D.; Li, Songrui; Mikolajick, Thomas; Schroeder, Uwe
- Source
- 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) Solid-State Sensors, Actuators and Microsystems (Transducers), 2023 22nd International Conference on. :256-259 Jun, 2023
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Robotics and Control Systems
Electrodes
Temperature sensors
Micromechanical devices
Transducers
Films
Imaging
Switches
Pyroelectricity
antiferroelectrics
sensors
- Language
- ISSN
- 2167-0021
Pyroelectrics convert changes in temperature to electricity, which is of significant interest for sensing and energy harvesting applications. Applied voltages are usually required to generate pyroelectricity in antiferroelectrics due to the instability of the polar phase. By sandwiching 8 – 6 nm thick antiferroelectric ZrO 2- based films in between electrodes with different work functions, pyroelectricity was stabilized without an applied voltage. Simple voltage pulses were used to turn the pyroelectric effect off and on by setting ZrO 2 into a nonvolatile nonpolar and polar state, respectively. The result is a passive sensor capable of active on/off switching.