Multi roof tile-shaped vibration modes in mems cantilever sensors for liquid monitoring purposes
- Resource Type
- Conference
- Authors
- Pfusterschmied, Georg; Kucera, Martin; Ruiz-Diez, Victor; Bittner, Achim; Sanchez-Rojas, Jose Luis; Schmid, Ulrich
- Source
- 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference on. :718-721 Jan, 2015
- Subject
- Aerospace
Bioengineering
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Power, Energy and Industry Applications
Transportation
Electrodes
Liquids
Sensors
Vibrations
Q-factor
Strain
Media
- Language
- ISSN
- 1084-6999
We realized piezoelectrically self-actuated self-sensing cantilever sensors for liquid monitoring purposes excited in higher orders of the roof tile-shaped mode. This advanced class of vibration mode supports very high Q-factors in liquid media and high volume strain values which result in combination with an optimized electrode design in enhanced strain related conductance peaks. Therefore, precise fluid property measurements even for highly viscous liquids like D500 (∼ 430 cP) are feasible.