Combination of additive and subtractive laser microprocessing in glass/polymer microsystems for chemical sensing applications
- Resource Type
- Conference
- Authors
- Tickunas, Titas; Perrenoud, Matthieu; Butkus, Simas; Rekstyte, Sima; Malinauskas, Mangirdas; Paipulas, Domas; Gadonas, Roaldas; Bellouard, Yves; Sirutkaitis, Valdas
- Source
- 2017 Conference on Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC) Lasers and Electro-Optics Europe & European Quantum Electronics Conference (CLEO/Europe-EQEC, 2017 Conference on). :1-1 Jun, 2017
- Subject
- Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Engineering Profession
General Topics for Engineers
Photonics and Electrooptics
- Language
The fabrication of a novel 3D polymer/glass micromechanical sensor concept is demonstrated by combining two femtosecond laser direct writing processes: laser exposure and chemical etching of glass combined with two-photon polymerization.