Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction
- Resource Type
- Conference
- Authors
- Arimoto, Hideo; Husain, Muhammad K.; Prasmusinto, Alyssa; Debnath, Kapil; Al-Attili, Abdelrahman; Petra, Rafidah; Chong, Harold M. H.; Reed, Graham T.; Saito, Shinichi
- Source
- 2015 IEEE 12th International Conference on Group IV Photonics (GFP) Group IV Photonics (GFP), 2015 IEEE 12th International Conference on. :90-91 Aug, 2015
- Subject
- Photonics and Electrooptics
Optical waveguides
Silicon
Etching
Optical device fabrication
Propagation losses
Optical losses
silicon photonics
waveguide
Si (110) plane
Tetra-Methyl-Ammonium-Hydroxide
propagation loss
- Language
- ISSN
- 1949-2081
1949-209X
Simple fabrication of low-loss Si/SiO2 waveguides with a flat side wall is proposed. Waveguides oriented to the direction on the Si (110) plane are fabricated by anisotropic wet etching and the lowest propagation loss is 1.4 dB/cm.