A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry
- Resource Type
- Conference
- Authors
- Sobreviela-Falces, Guillermo; Pandit, Milind; Mustafazade, Arif; Zhao, Chun; Pili, Callisto; Baker, Colin; Seshia, Ashwin
- Source
- 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2021 IEEE 34th International Conference on. :196-199 Jan, 2021
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Micromechanical devices
Accelerometers
Semiconductor device measurement
Seismology
Vibration measurement
Thermal stability
Floors
resonators
thermal stability
frequency stability
sensors
- Language
- ISSN
- 2160-1968
A differential MEMS vibrating beam accelerometer (VBA) demonstrating excellent stability for seismology and gravimetry applications is presented. The accelerometer response demonstrates excellent linearity over an acceleration range of ±1 g (1 g = 9.8 m s -2 ) with a scale factor of 9825 Hz/g. An approximately flat output Allan deviation with an average value of 15 ng is recorded over integration times τ = 1 s – 1000 s with a best-case bias instability of < 10 ng and a noise floor of 10 ng/√H. These results, taken collectively, set new benchmarks for vibrating beam MEMS accelerometers.