Locally synthesized metal oxide nanowire-devices and their gas sensing applications
- Resource Type
- Conference
- Authors
- Kim, D.; Lim, M. A.; Yang, D.; Li, Z.; Park, C.O.; Park, I.
- Source
- 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International. :791-794 Jun, 2011
- Subject
- Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Signal Processing and Analysis
Power, Energy and Industry Applications
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Robotics and Control Systems
Zinc oxide
Sensors
Sensitivity
Electrodes
Nanowires
Surface treatment
Heating
Localized hydrothermal synthesis
Hydrogen gas sensor
ZnO Nanowire
- Language
- ISSN
- 2159-547X
2164-1641
Highly efficient and simple process to fabricate ZnO nanowire-based gas sensing devices was developed. ZnO nanowires (NWs) were locally synthesized by hydrothermal method using localized thermal energy, which is generated by microheater arrays integrated in the device. To enhance the sensitivity to hydrogen (H 2 ) gas of ZnO NW-based sensor, the surface of ZnO NWs was modified with Platinum (Pt) nanoparticles via local wet chemical reaction. H2 sensing performances of the intrinsic and Pt-coated ZnO NWs were compared at two operating temperatures (250°C and 350°C). We found that the sensing device based on ZnO NWs decorated with Pt nanoparticles has higher sensitivity compared with intrinsic ZnO NW sensor.