A new electronic scheme to compensate MEMS resonators nonlinearities
- Resource Type
- Conference
- Authors
- Levy, R.; Papin, G.
- Source
- 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on. :508-510 Jan, 2012
- Subject
- Fields, Waves and Electromagnetics
Computing and Processing
Components, Circuits, Devices and Systems
Communication, Networking and Broadcast Technologies
- Language
- ISSN
- 1084-6999
MEMS resonators are used for miniature time references and vibrating sensors. The mechanical nonlinearities of such micro resonators limit their power handling and thus the frequency stability and phase noise of MEMS resonators based oscillators. This paper reports a new circuit scheme to compensate the nonlinear behavior of MEMS resonators. Simulations and experimental results show the effective nonlinearity compensation.