A Study of Materials Impacts on Graphene Electrostatic Discharge Switches
- Resource Type
- Conference
- Authors
- Li, Cheng; Di, Mengfu; Pan, Zijin; Wang, Albert
- Source
- 2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) Electron Devices Technology & Manufacturing Conference (EDTM), 2021 5th IEEE. :1-3 Apr, 2021
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Performance evaluation
Micromechanical devices
Integrated circuits
Transmission lines
Microswitches
Graphene
Electrostatic discharges
graphene
ESD
poly crystalline
single crystalline
TLP
MEMS
- Language
Electrostatic discharge (ESD) protection is required for ICs. Traditional in-Si PN junction ESD protection structures introduce significant ESD-induced design overheads including parasitic capacitance, leakage, noises and device sizes, which become unacceptable to advanced ICs. A novel graphene-based micro electrical mechanical system (MEMS) was reported as an alternative ESD protection solution. This paper reports a study of influences of graphene materials quality on the graphene ESD switch devices. Transmission-line pulse (TLP) testing shows that single-crystalline graphene film can improve the ESD switch performance dramatically over the polycrystalline counterpart.