Performance of the trial scanning atom-probe-new approach to evaluate micro-tip array
- Resource Type
- Conference
- Authors
- Nishikawa, O.; Iwatsuki, M.; Aoki, S.; Ishikaswa, Y.
- Source
- IVMC '95. Eighth International Vacuum Microelectronics Conference. Technical Digest (Cat. No.TH8012) Vacuum microelectronics Vacuum Microelectronics Conference, 1995. IVMC., 1995 International. :509-511 1995
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Electrodes
Optical arrays
Atomic measurements
Voltage
Atom optics
Materials science and technology
Electron optics
Mechanical engineering
Laboratories
Performance analysis
- Language
The scanning atom probe (SAP) was proposed to realize atom-by-atom mass analysis of a flat specimen surface with micro-tip arrays or many microcusps. The unique feature of the SAP is in the introduction of a microextraction electrode to the conventional atom-probe which scans over the specimen surface. In this paper a trial SAP was constructed by modifying a low temperature UHV scanning tunneling microscope (STM) with a scanning electron microscope (SEM) in order to inspect the relative position of the tip and the electrode.