Towards Wafer Scale Inductive Determination of Magnetostatic and Dynamic Parameters of Magnetic Thin Films and Multilayers
- Resource Type
- Periodical
- Authors
- Sievers, S.; Liebing, N.; Nass, P.; Serrano-Guisan, S.; Pasquale, M.; Schumacher, H. W.
- Source
- IEEE Transactions on Magnetics IEEE Trans. Magn. Magnetics, IEEE Transactions on. 49(1):58-61 Jan, 2013
- Subject
- Fields, Waves and Electromagnetics
Magnetic resonance
Magnetic heads
Probes
Magnetic multilayers
Magnetostatics
Magnetostatic waves
Transmission line measurements
Ferromagnetic resonance
Gilbert damping
magnetic multilayer
magnetic thin film
wafer level testing
- Language
- ISSN
- 0018-9464
1941-0069
We investigate an inductive probe head suitable for noninvasive characterization of the magnetostatic and dynamic parameters of magnetic thin films and multilayers on the wafer scale. The probe is based on a planar waveguide with rearward high frequency connectors that can be brought in close contact to the wafer surface. Inductive characterization of the magnetic material is carried out by vector network analyzer ferromagnetic resonance. Analysis of the field dispersion of the resonance allows the determination of key material parameters such as the saturation magnetization ${M}_{S}$ or the effective damping parameter $a_{eff}$. Three waveguide designs are tested. The broadband frequency response is characterized and the suitability for inductive determination of ${M}_{S}$ and $a_{eff}$ is compared. Integration of such probes in a wafer prober could in the future allow wafer scale in-line testing of magnetostatic and dynamic key material parameters of magnetic thin films and multilayers.