Issues and advances in rapid Quasi-Static CV for high throughput semiconductor process monitoring
- Resource Type
- Conference
- Authors
- Herman, Michael H.; Jang, Daniel; Nagel, Mark; Morris, Ben
- Source
- 2022 IEEE 34th International Conference on Microelectronic Test Structures (ICMTS) Microelectronic Test Structures (ICMTS), 2022 IEEE 34th International Conference on. :1-6 Mar, 2022
- Subject
- Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
General Topics for Engineers
Signal Processing and Analysis
Process monitoring
Instruments
Capacitance-voltage characteristics
Voltage
Throughput
Capacitance
Semiconductor process modeling
capacitance
quasi-static
LCR
QSCV
- Language
- ISSN
- 2158-1029
A rapid Quasi-Static Capacitance-Voltage (QSCV) method has been advanced to extract simultaneous Cp and Rp values. Multi-segment voltage stimulus waveforms generate digitized currents from single or parallel DUTs. Resulting current vectors are resolved into Rparallel (Rp) and C parallel (Cp) components using vector analysis methods. We compare QSCV and LCR methods and discuss instrument and modeling issues.