Vibration Rectification Error Reduction in Mems Vibrating Beam Accelerometers by Using the F-Squared Method
- Resource Type
- Conference
- Authors
- Miani, Theo; Gurung, Lokesh; Sobreviela-Falces, Guillermo; Young, Douglas; Baker, Colin; Seshia, Ashwin
- Source
- 2024 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Inertial Sensors and Systems (INERTIAL), 2024 IEEE International Symposium on. :1-4 Mar, 2024
- Subject
- General Topics for Engineers
Vibrations
Micromechanical devices
Accelerometers
Inertial sensors
Vibration measurement
Dynamic range
Benchmark testing
Vibrating beam accelerometer
Vibration Rectification Error
Scale Factor Non-Linearities
f-square method
- Language
- ISSN
- 2377-3480
We present on the results of vibration rectification measurements for low-noise MEMS vibrating beam accelerometers (VBAs) [1] with a dynamic range of ± 25g. We introduce an experimental setup designed for precise and repeatable measurement of VRE using random vibration tests. These tests demonstrate scale factor non-linearity (SFNL) to be dominant contribution to vibration rectification error (VRE). In this paper, we demonstrate a significant reduction in SFNL and consequently the VRE coefficient by employing the f-squared method. This results in the demonstration of accelerometers with both high and low bias demonstrating a low measured VRE < 10 µg/g 2 .