SUB-0.05° precision optofluidic dual-axis inclinometer
- Resource Type
- Conference
- Authors
- Wahl, Sebastian; Marty, Frederic; Pavy, Nicolas; Mercier, Bruno; Angelescu, Dan E.
- Source
- 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2014 IEEE 27th International Conference on. :797-800 Jan, 2014
- Subject
- Fields, Waves and Electromagnetics
Mobile communication
Silicon
Optical sensors
Prototypes
Surface treatment
Rough surfaces
- Language
- ISSN
- 1084-6999
This paper details a low-power bi-axial miniaturized inclinometer based on a mobile mass (spherical ball or fluidic droplet) positioned on a precision curved surface that is generated using a novel MEMS process. The detection of the mobile mass was implemented through an external optical system, using a quadrant photodetector. Nanotopography and chemical treatment of the curved surface have been implemented to increase accuracy when using a fluidic mobile mass, by tailoring wetting properties and minimizing contact angle hysteresis. We achieve a range of ±1° with a true linear bi-axial measurement of precision better than 0.05°.