A Navigation-Grade Mems Vibrating Beam Accelerometer
- Resource Type
- Conference
- Authors
- Sobreviela-Falces, Guillermo; Pandit, Milind; Young, Douglas; Pili, Callisto; Mcintosh, James; Abbott, Julian; Brook, Guy; Reed, Matthew; Steinmann, Philipp; MacCarthy, Niall; Baker, Colin; Seshia, Ashwin A.
- Source
- 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) Micro Electro Mechanical Systems Conference (MEMS), 2022 IEEE 35th International Conference on. :782-785 Jan, 2022
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Micromechanical devices
Accelerometers
Particle beams
Current measurement
Conferences
Prototypes
Vibration measurement
accelerometers
resonators
frequency stability
inertial sensors
- Language
- ISSN
- 2160-1968
This paper reports on a differential MEMS vibrating beam accelerometer (VBA) demonstrating excellent stability for inertial navigation applications (bias instability < 1μg), The accelerometer response demonstrates excellent linearity over an acceleration range of ±25 g (1 g = 9.8 m S −2 ) with a scale factor of 1110 Hz/g. An in-run bias instability of 0.123 μg for a 10s integration time and a velocity random walk of 0.7μg/√Hz are recorded. The MEMS VBA has been extensively tested with measured results benchmarking favorably relative to current state-of-the-art navigation-grade MEMS accelerometers.