A Miniature All-optical Dual-resonance Photoacoustic Sensor for Trace Gas Measuring
- Resource Type
- Conference
- Authors
- Wu, Guojie; Gong, Zhenfeng; Li, Haie; Ma, Junsheng; Mei, Liang
- Source
- 2022 IEEE 14th International Conference on Advanced Infocomm Technology (ICAIT) Advanced Infocomm Technology (ICAIT), 2022 IEEE 14th International Conference on. :180-183 Jul, 2022
- Subject
- Communication, Networking and Broadcast Technologies
Photonics and Electrooptics
Micromechanical devices
Gases
Spectroscopy
Sensitivity
Resonant frequency
Extraterrestrial measurements
Silicon
high sensitivity
fiber-optic acoustic sensor
photoacoustic spectroscopy
- Language
- ISSN
- 2770-1603
In this paper, a miniature all-optical dual-resonance photoacoustic (PA) sensor is demonstrated. This sensor consists of a small size resonant T-type PA cell together with an integrated sensor probe with a silicon cantilever beam. With the average time of 1 s, the minimum detection limit is tested to be 1.2 parts-per-million. Therefore, we believe that the reported sensor can be suitable for high-sensitivity measurements of trace gases in sub-cubic centimeter-scale spaces.