A High Heat Transfer Efficiency MEMS Thermal Conductivity Gas Sensor with Bridge Structure for Hydrogen Detection
- Resource Type
- Conference
- Authors
- Xie, Dongcheng; Zhang, Yan; He, Di; Yang, Yujie; Liu, Ruichen; Xing, Chong; Chen, Dongliang; Geng, Liang; Wu, Qiuju; Yao, Dongting; Xu, Lei
- Source
- 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :879-882 Jan, 2024
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Temperature sensors
Micromechanical devices
Heating systems
Bridge circuits
Conductivity
Heat transfer
Gas detectors
Thermal conductivity gas sensor
suspended bridges
curved design
high heat transfer efficiency
- Language
- ISSN
- 2160-1968
This paper reports a low-cost MEMS gas sensor based on thermal conductivity principle that formed by three independent suspended bridges including a microheater and a pair of symmetrical temperature sensors. To enhance sensing ability of the temperature sensors to the heat source for sensitivity improving, the microheater adopts a curved design and are fully surrounded by the temperature sensors on both sides to increase the lateral heat conduction path. Meanwhile, the gaps between heater and temperature sensors are small enough to improve thermal response of the temperature sensors. The fabricated sensor realized high response to H 2 .