Diagnostic and monitoring tools of large scale Si-manufacturing: trace-analytical tools and techniques in Si-wafer manufacturing
- Resource Type
- Periodical
- Source
- IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 9(3):428-436 Aug, 1996
- Subject
Components, Circuits, Devices and Systems Engineered Materials, Dielectrics and Plasmas Monitoring Large-scale systems Atomic force microscopy Infrared spectra Silicon Tomography Surface topography Electron microscopy Mass spectroscopy Fourier transforms - Language
- ISSN
- 0894-6507
1558-2345