Minimize distortion in free-standing sensor plates using electroformed reinforced beam
- Resource Type
- Conference
- Authors
- Shooshtari, Pooneh; Khosraviani, Kourosh; Jones, John; Leung, Albert
- Source
- 2012 IEEE Sensors Sensors, 2012 IEEE. :1-4 Oct, 2012
- Subject
- Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Signal Processing and Analysis
Nickel
Structural beams
Residual stresses
Fabrication
Substrates
Silicon
- Language
- ISSN
- 1930-0395
This paper describes a novel fabrication method to minimize bending and distortion of sensor plates by adding a thick (a few microns) nickel-reinforced beam on a thin (≤one micron) sensor plate. The creation of a thick nickel layer on a thin oxide film by electroforming at relatively low temperature (∼45°C) reduces the amount of bending and improves the flatness. We take advantage of a simple Ni electroforming formula [1] for reproducing nickel parts and structures with minimum distortion that creates a flat nickel-reinforced beam.