Coupling analysis of a tunable microwave and laterally vibrating MEMS resonator
- Resource Type
- Conference
- Authors
- Ghosh, Siddhartha; Rosenberg, Danna; Kharas, Dave; Hirjibehedin, Cyrus F.
- Source
- 2022 IEEE MTT-S International Conference on Microwave Acoustics and Mechanics (IC-MAM) Microwave Acoustics and Mechanics (IC-MAM), 2022 IEEE MTT-S International Conference on. :114-116 Jul, 2022
- Subject
- Components, Circuits, Devices and Systems
Couplings
Integrated optics
Micromechanical devices
Microwave integrated circuits
Optical resonators
Microwave circuits
Microwave oscillators
aluminum nitride
piezoelectric resonator
Josephson junction
capacitive coupling
avoided level crossing
- Language
Mechanical resonators can be used to mediate an effective interaction between microwave and optical photons [1], [2]. To create this interaction, the mechanical resonator must be simultaneously coupled to both an optical mode and an electrical microwave mode. One way of achieving sufficiently strong coupling between the mechanical and electrical microwave modes is to use the piezoelectric effect. In this work, we characterize laterally vibrating piezoelectric AlN MEMS resonators operating at 5 GHz. Extracted parameters are then used in a circuit analysis to determine the coupling rate that can be achieved with respect to a Josephson-junction-based tunable resonator. Future integration of these mechanical modes with optical cavities will form the basis for an efficient transducer for applications in quantum information systems.