Efficient Optical Coupling between III-V Semiconductor and SiNx Waveguides via Heteroepitaxial Integration
- Resource Type
- Conference
- Authors
- Heidelberger, Christopher; Sorace-Agaskar, Cheryl; Plant, Jason J.; Kharas, Dave; Swint, Reuel B.; Dhingra, Pankul; Lee, Minjoo L.; Juodawlkis, Paul W.
- Source
- 2021 IEEE Photonics Conference (IPC) Photonics Conference (IPC),2021 IEEE. :1-2 Oct, 2021
- Subject
- Components, Circuits, Devices and Systems
Optical losses
Semiconductor device measurement
Optical device fabrication
Optoelectronic devices
Optical coupling
Silicon
Semiconductor waveguides
- Language
- ISSN
- 2575-274X
We demonstrate the first reported integration of III-V waveguides (GaAs/Al0.4Ga0.6As) with SiN x waveguides via heteroepitaxial III-V-on-silicon growth. We achieve efficient optical coupling (-2.5 dB loss/transition) at 1550 nm and low threading dislocation density $(4\times 10^{6}\text{cm}^{-2})$, suitable for fabrication of high-performance optoelectronic devices. © 2021 Massachusetts Institute of Technology