Feasibility study on in situ CCVD grown CNTs for field-effect power device applications
- Resource Type
- Conference
- Authors
- Keyn, Martin; Wessely, Pia Juliane; Wessely, Frank; Rispal, Lorraine; Palm, Johannes; Schwalke, Udo
- Source
- 7th International Conference on Design & Technology of Integrated Systems in Nanoscale Era Design & Technology of Integrated Systems in Nanoscale Era (DTIS), 2012 7th International Conference on. :1-3 May, 2012
- Subject
- Components, Circuits, Devices and Systems
Computing and Processing
Communication, Networking and Broadcast Technologies
General Topics for Engineers
Substrates
Carbon nanotubes
Fabrication
Palladium
Hydrogen
Annealing
CNTFETs
carbon nanotubes
carbon nanotube field-effect transistor
catalytic chemical vapor deposition
power application
LED
- Language
In this paper we investigate the feasibility of carbon nanotubes (CNTs) for power applications. On the basis of a process which fabricates thousands of carbon nanotube field-effect transistors (CNTFETs) by means of catalytic chemical vapor deposition (CCVD) we will show that CNTFETs are capable to provide a sufficiently high current to drive a light-emitting diode (LED).