Low-Loss Thin Film Lithium Niobate Bonded on Silicon Nitride Waveguides
- Resource Type
- Conference
- Authors
- Ghosh, Siddhartha; Yegnanarayanan, Siva; Ricci, Matthew; Kharas, Dave; Juodawlkis, Paul
- Source
- 2020 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2020 Conference on. :1-2 May, 2020
- Subject
- Photonics and Electrooptics
Optical waveguides
Optical ring resonators
Bonding
Surface waves
Optical surface waves
Optical losses
Silicon
- Language
We demonstrate heterogeneous integration of thin film LiNbO 3 on Si 3 N 4 photonic integrated circuits with SiO 2 , Al 2 O 3 and direct bonding. We report record low losses in bonded ring resonators of 0.4 dB/cm (intrinsic Q = 8.19×10 5 ).