Nanostructure Characterization and Film Thickness Measurements at the Fabrication Line
- Resource Type
- Conference
- Authors
- Madsen, Jonas S.M.; Korhonen, Raimo; Peltonen, Petri; Rodenko, Olga; Jensen, Soren A.
- Source
- 2022 IEEE 12th International Conference Nanomaterials: Applications & Properties (NAP) Nanomaterials: Applications & Properties (NAP), 2022 IEEE 12th International Conference. :01-04 Sep, 2022
- Subject
- Bioengineering
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Radar measurements
Optical device fabrication
Quality control
Interference
Optical variables measurement
Time measurement
Optical scattering
Roll to Roll nanoembossing
Optical scatterometry
In-line quality control
- Language
Roll-to-roll embossing is a fast and inexpensive method for producing nanotextured polymer foils in high volumes. We present results from an optical scatterometric method for characterizing the dimensions of roll-to-roll embossed periodic nanogratings, which display optical color effects. This method enables in-line, non-destructive quality control during fabrication. Feature heights are extracted with nm resolution for sinusoidal and square type gratings. Further, it is shown that film thicknesses can be determined by analyzing the spectral interference pattern observed in thin polymer films.