Avalanche Photoionization Detector
- Resource Type
- Conference
- Authors
- Huang, Xiaheng; Wu, Weishu; Fan, Xudong
- Source
- 2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS) Micro Electro Mechanical Systems (MEMS), 2024 IEEE 37th International Conference on. :856-858 Jan, 2024
- Subject
- Bioengineering
Components, Circuits, Devices and Systems
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Volatile organic compounds
Micromechanical devices
Detectors
Silicon
Junctions
Microfluidics
Substrates
Microfluidic gas sensor
avalanche P/N junction
- Language
- ISSN
- 2160-1968
This paper reports a microfluidic gas sensor termed avalanche photoionization detector (APID). The APID employs miniaturized vacuum-UV (VUV) lamp as a photoionization source to ionize volatile organic compounds (VOCs) within a microfluidic ionization chamber made of a MgF 2 substrate bonded to an etch-through silicon microfluidic channel. The resultant electrons are collected by a reversely-biased avalanche P/N junction and subsequently undergo an avalanche process within the junction's depletion region, resulting in a substantial internal gain.