Single-Photon Emitters in Aluminum Nitride by Zr ion Implantation
- Resource Type
- Conference
- Source
- 2023 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2023 Conference on. :1-2 May, 2023
- Subject
Photonics and Electrooptics Zirconium Ion implantation Stimulated emission Optical films Electo-optic effects Aluminum nitride - Language