A pneumatic actuator has several advantages such as low heat generation, high weight power ratio, and low cost. However, it has several disadvantages such as time delays and nonlinearities. Because pressure and position feedback band-widths are limited by the time delay problem, it is difficult to implement a pneumatic actuator for a scan stage. Therefore, this paper proposes a modified Smith predictor for it and implements for an experimental scan stage. The effectiveness of the proposed control system is validated by frequency and time domain experiments.