Monolithic Multiwavelength VCSEL Array Using Cavity Patterning
- Resource Type
- Periodical
- Authors
- Pissis, A.; Tirelli, S.; Bosco, L.; Gorbenko, V.; Suess, M.; Siegenthaler, U.; Quandt, D.; Bonfrate, D.; Kanungo, P.D.; Zibik, E.
- Source
- IEEE Photonics Technology Letters IEEE Photon. Technol. Lett. Photonics Technology Letters, IEEE. 34(18):961-964 Sep, 2022
- Subject
- Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Vertical cavity surface emitting lasers
Gratings
Refractive index
Optical variables control
Optical refraction
Optical device fabrication
Stimulated emission
VCSEL
wavelength control
WDM
multiwavelength laser
MOVPE growth
overgrowth
- Language
- ISSN
- 1041-1135
1941-0174
We report on a novel approach to adjust the emission wavelength of VCSEL devices. By patterning the Fabry-Perot cavity, we can control the effective refractive index of the optical mode and thus adjust the resonant wavelength. We developed a fabrication process based on 2 steps epitaxy and a lithographic cavity patterning to define the emission wavelength at the emitter level. A multiwavelength VCSEL array with a 30 nm wavelength tuning range around 940 nm is demonstrated.