We developed growth method allowing covering of different types of objects, such as surgical instruments, tissues, masks, etc. with the atomic layer deposition method using oxide thin layers as antimicrobial coatings. These layers are deposited at low temperature (usually below 100°C), which allows for the covering of various substrates, including the soft tissue paper material or surgical instruments, as well as, synthetic and organic materials. The elaborated method of coating on various kinds of surfaces with metal oxide layers can be very helpful in reducing the energy and water inputs to processes designed to eliminate micro-organisms (sterilization), especially in the food industry, production technology and production of animal feed. Potential applications can also be found in medicine, veterinary medicine and the broader health care.