Cantilevers for Atomic Force Microscopy Prepared by 3D Laser Lithography
- Resource Type
- Conference
- Authors
- Gaso, Peter; Bulatov, Sergii; Pudis, Dusan; Jandura, Daniel
- Source
- 2024 ELEKTRO (ELEKTRO) ELEKTRO (ELEKTRO), 2024. :1-4 May, 2024
- Subject
- Aerospace
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
General Topics for Engineers
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Atomic force microscopy
Three-dimensional displays
Atom lasers
Shape
Atomic beams
Lithography
Force
atomic force microscopy
cantilever
direct laser writing
polymers
- Language
- ISSN
- 2691-0616
In this paper, we designed, prepared and characterized new types of IP-Dip polymer based cantilevers for atomic force microscopy (AFM). The design and fabrication is aimed to the capability of 3D laser lithography using standard silicon platform employed in commercial AFM systems.