Chemical performance and high temperature characterization of micromachined chemical reactors
- Resource Type
- Conference
- Authors
- Srinivasan, R.; Firebaugh, S.L.; Hsing, I.-M.; Ryley, J.; Harold, M.P.; Jensen, K.F.; Schmidt, M.A.
- Source
- Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) Solid-state sensors and actuators Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on. 1:163-166 vol.1 1997
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Robotics and Control Systems
Signal Processing and Analysis
Temperature
Chemical products
Chemical reactors
Oxidation
Inductors
Throughput
Flammability
Gases
Packaging
Degradation
- Language
Chemical throughput, product distribution, and lifetime studies have been conducted in Si micromachined chemical reactors (microreactors) for catalytic partial oxidation reactions. Experiments using Pt-catalyzed NH/sub 3/ oxidation as model reaction show that conversion and selectivity behavior of conventional reactors can be reproduced in the microreactor. Highly flammable gases that explode in conventional reactors have been safely oxidized in the microreactor. Packaging and high-temperature materials degradation have been identified as technical challenges to commercial chemical production using microreactor systems.