Dielectric Charge Measurement in Capacitive Microwave Shunt Switches
- Resource Type
- Conference
- Authors
- Schultz, J.S.; Firebaugh, S.L.; Charles, H.K.; Edwards, R.L.; Keeney, A.C.; Wilderson, S.F.
- Source
- 2005 IEEE Instrumentationand Measurement Technology Conference Proceedings Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proceedings of the IEEE. 2:1345-1349 2005
- Subject
- Components, Circuits, Devices and Systems
Power, Energy and Industry Applications
Charge measurement
Bridge circuits
Radiofrequency microelectromechanical systems
Dielectric measurements
Communication switching
Voltage
Power semiconductor switches
Conductors
Micromechanical devices
Electrostatics
Microelectromechanical devices
MEMS
dielectric charging
micromachining
microwave
reliability
switches
- Language
- ISSN
- 1091-5281
The use of Microelectromechanical Systems as electronic switches in circuits for microwave frequency applications has grown considerably in the past decade. One phenomenon that limits the reliability of these switches is dielectric charging. Using a non-contact technique for measuring dielectric charging, the rate at which dielectric charging occurs can be measured and used to predict further charging. The prediction of dielectric charging can help optimize the controllable variables to minimize the extent of the phenomenon.