Optical deflection measurement for characterization of microelectromechanical systems (MEMS)
- Resource Type
- Periodical
- Authors
- Firebaugh, S.L.; Charles, H.K., Jr.; Edwards, R.L.; Keeney, A.C.; Wilderson, S.F.
- Source
- IEEE Transactions on Instrumentation and Measurement IEEE Trans. Instrum. Meas. Instrumentation and Measurement, IEEE Transactions on. 53(4):1047-1051 Aug, 2004
- Subject
- Power, Energy and Industry Applications
Components, Circuits, Devices and Systems
Microelectromechanical systems
Micromechanical devices
Optical sensors
Displacement measurement
Optical fibers
Optical fiber sensors
Sensor phenomena and characterization
Sensor systems
Optical switches
Calibration
- Language
- ISSN
- 0018-9456
1557-9662
Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstrated in the characterization of a microwave switch. The deflection system had a demonstrated sensitivity of 290/spl plusmn/32 /spl mu/V/nm over a deflection range of 100 /spl mu/m. The calibration and linearity of the system are described, and the static and dynamic performance is compared to more elaborate systems.