Photoacoustic chemical sensing on a MEMS-based platform
- Resource Type
- Conference
- Authors
- Pellegrino, P.M.; Polcawich, R.G.; Firebaugh, S.L.
- Source
- International Semiconductor Device Research Symposium, 2003 Semiconductor device research Semiconductor Device Research Symposium, 2003 International. :498-499 2003
- Subject
- Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Chemicals
Spectroscopy
Micromechanical devices
Acoustic signal detection
Monitoring
Nonhomogeneous media
Stacking
Temperature
Bonding
Fabrication
- Language
This paper deals with the gas detection system (MEMS-based platform), which uses photoacoustic spectroscopy as a monitoring technique. One advantage of photoacoustic spectroscopy is that the photoacoustic signals scales inversely with the cross-sectional area of the acoustic cavity. This paper also deals with the MEMS acoustic cavity design which investigates multilayer stacking arrangements using several low temperature bonding schemes to allow for complete fabrication of acoustic structures present in macro-cell design. Results are presented describing the miniature photoacoustic cell capabilities, current MEMS microphone performance and initial cell designs based on transmission-line modeling.