This paper presents new results from the first thermal accelerometer fabricated using Plasma Enhanced Atomic Layer Deposition. PEALD allows for ultrathin high-density platinum films that deliver excellent stability and accuracy [1]. We offer a 100x cross-section reduction relative to previous thermal accelerometers, thereby increasing the heating efficiency and decreasing thermal time constants [2,3,4,5]. The resistance thermometers and heaters capitalize on the properties provided by PEALD and Pt: extreme stability, high resistivity, and linear temperature coefficient of resistance (TcR) [6]. For a heater temperature rise of 150°C, this device has a raw sensitivity of 54 m o C/g, excellent cross-axis isolation, and remarkably low drift.