High-throughput ultrafast laser micromachining with multiple parallel spots
- Resource Type
- Conference
- Authors
- Bruening, Stephan; Du, Keming; Gillner, Arnold
- Source
- 2022 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2022 Conference on. :1-2 May, 2022
- Subject
- Photonics and Electrooptics
Power lasers
Surface emitting lasers
Process control
Modulation
Micromachining
Lasers and electrooptics
Laser beams
- Language
The parallel use of a large number of ultrashort pulsed laser beams with individual power modulation creates a completely new digital controllable tool in surface processing. High performance ultrashort pulsed lasers allow the material independent processing in nanometer accuracy, even for large components.