Intense green light emission from low temperature grown SiNO complex system
- Resource Type
- Conference
- Authors
- Dong, Hengping; Huang, Rui; Wang, Danqing; Chen, Kunji; Li, Wei; Ma, Zhongyuan; Xu, Jun; Huang, Xinfan
- Source
- 2008 5th IEEE International Conference on Group IV Photonics Group IV Photonics, 2008 5th IEEE International Conference on. :158-160 Sep, 2008
- Subject
- Photonics and Electrooptics
Components, Circuits, Devices and Systems
Films
Silicon
Oxidation
Performance evaluation
Current density
Plasmas
Radiative recombination
- Language
- ISSN
- 1949-2081
1949-209X
We report intense green photoluminescence from amorphous oxidized silicon nitride film (a-SiN:O). A-SiN:O light-emitting devices of green-yellow color are successfully fabricated. Notably, EL efficiency can be significantly enhanced by modulating Si/N ratio in luminescent active layer.