Image-based measurement of periodic SPM trajectories
- Resource Type
- Conference
- Authors
- Clayton, G. M.; Deshmukh, V.
- Source
- Proceedings of the 2010 American Control Conference American Control Conference (ACC), 2010. :5751-5756 Jun, 2010
- Subject
- Robotics and Control Systems
Scanning probe microscopy
Image sensors
Calibration
Position measurement
Measurement standards
Tunneling
Data mining
Fourier series
Context modeling
Velocity measurement
- Language
- ISSN
- 0743-1619
2378-5861
In this paper, measurement of periodic nano-scale scanning probe microscope (SPM) trajectories is achieved by extracting position information from images of standard SPM calibration samples. Image-based approaches have been applied to the measurement of low-speed effects and for the measurement and control of high-speed sinusoidal trajectories. The main contribution of this paper is the application of image-based methods to measure general periodic trajectories that can be represented by a truncated Fourier series. The image-based trajectory measurement approach is discussed in the context of a scanning tunneling microscope (STM) example and simulation results are presented that show the validity of the developed method.